• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    OPTICAL NETWORK COUPLING STRUCTURE.The invention relates to a network coupler comprising: - an optical substrate arranged to transfer a beam of light, and - a diffraction network arranged or incorporated on the surface of said optical substrate, wherein said diffraction network comprises elements of diffraction grating which each comprise a coating arranged asymmetrically in said diffraction grating elements. The network coupler is additionally arranged to satisfy the condition: (n1 x sen (? A?) +? 2) /? x P > 1, where n1 is the refractive index of the optical medium in relation to the incident light side of the diffraction network elements, n2 is the refractive index of the optical medium in relation to the diffracted light side of the diffraction network elements, Ial is the absolute value of the incident angle of the incident beam in the network coupler,? is the wavelength in the diffracted vacuum, and P is the period of the diffraction network elements.
    公开号:BR112016009211A2
    申请号:R112016009211-2
    申请日:2013-10-29
    公开日:2020-11-10
    发明作者:Fabian Lutolf；Martin Stalder；Guillaume Basset
    申请人:CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement；
    IPC主号:
    专利说明:

    [001] [001] The present invention relates to dispersive optical structures and the like for coupling light inside or outside an optical medium. More specifically, the invention relates to diffractive and similar structures, arranged in these optical media, and intended to be used as light couplers in optical instruments, optical sensors and optical devices. BACKGROUND OF THE INVENTION
    [002] [002] Networks are very important building blocks in various optical systems. They are implemented in a wide field of applied optics and industrial applications. A large number of modern optical devices and systems deploy all types of optical networks since many photo-spectroscopic devices, lasers, solar modules and systems, optical waveguides, wave filters, optical sensors, rely on efficient redirection of light as a depending on the wavelength of that light. Diffraction grids can be used as a device to change the angle of an incident beam, to separate light into its different spectral components, to mix beams with different wavelengths, such as in a telecommunications multiplexer or to filter a part of the spectrum of a light beam, such as in a monochromator or spectrometer.
    [003] [003] Diffraction grids are also finding more and more applications in security devices and in display applications. They can also be found in fiber optic sensors, for example, in the form of distributed Bragg networks. For polarization applications, as well as applications that use the interaction of plasmons with photons, metallic networks have also been widely considered.
    [004] [004] Numerous basic publications in the literature focus on physics, manufacturing technologies and network applications, such as: - M. Born and E. Wolf, “Principles of Optics”, Pergamon Press, Oxford, 1993.
    [005] [005] There are many publications that describe how to improve the efficiency of networks and network structures, how to miniaturize and manufacture them and two decades ago, a lot of effort was also made in the development of methods of replicating network structures.
    [006] [006] The standard approach to redirect light through the diffraction effect is through the use of periodic microstructures, such as micro-grooves manufactured on the surface of a glass or metallic surface. More than a century ago, the first networks were simple groove-shaped lines and were made using diamond engraving techniques that require large and complicated mechanical machines. Currently, these micro-grooves can be manufactured by a wide variety of techniques, such as diamond machining, engraving, nanoprinting or deposition techniques, and through modern technology, complicated groove shapes can be made, such as multi-level diffractive optical elements or DOEs . There has been a constant tendency to improve networks by developing new formats, new network layouts and using special materials that have specific properties, such as the refractive index or the combination of different materials, in order to obtain special optical effects with the networks.
    [007] [007] In order to improve the efficiency of light diffraction through a network, asymmetric groove network profiles in a substantially linear shape have been considered in the past, with cross-sections (ie perpendicular to the groove line) of the network elements that have a shape, such as sawtooth shape, inclined, binary with brightness (blazed) or multilevel stage. The shape of the grid structures that diffract light are, in general, optimized for a specific angle of incidence of light that strikes the network, most common, a normal angle of incidence and a preferred diffraction order, typically the first or second diffraction order, although higher orders can also be considered, such as in an echelle network, where the diffraction order can be very high, for example 30 or 80. For low order diffraction purposes, efficiency can be obtained producing a shining type diffraction network, which is designed for cross-sections of a network element in a substantially trapezoidal shape, whose surfaces inclined in relation to the normal angle of incidence for the network, are arranged in order to diffract the light in a specific predetermined direction. All the networks mentioned above, however, are both challenging and costly to manufacture or replicate.
    [008] [008] The diffraction efficiency which is a parameter that is constantly improved as a particular diffraction order is used, and the rest of the transmitted, scattered or diffracted light is mainly the disturbing light for the system. So, someone constantly seeks to improve the diffraction efficiency.
    [009] [009] A structure that reduces transmitted zero-order light from networks is disclosed in the document in US 2005/0078374, in which a partial metallization of the network element reduces zero-order light. The revealed structure uses shiny type network structures, which are difficult to manufacture and reproduce. The structure disclosed in the document in US 2005/0078374 still has a basic limitation on diffraction orders other than zero order.
    [010] [010] More specifically, networks can be used to efficiently couple light to a waveguide or window. Different lattice structures have been proposed, such as diffraction grids to improve the coupling of light in optical waveguide, as in the document in WO 2010/122329, in which shiny mesh elements are provided on the waveguide surface . As the network elements are shiny, their realization is difficult and the diffraction efficiency remains limited by the fundamental limitations mentioned above.
    [011] [011] In other approaches to improve the coupling of light by the network couplers in a waveguide, dielectric coatings have been used on the network elements.
    [012] [012] Other methods have been proposed to improve the light coupling efficiency of dull, binary networks, as described by S. Siitonen et al in their article "A double-sided grating coupler for thin waveguides", Opt.
    [013] [013] Although binary crossed networks, arranged on opposite sides of a thin waveguide, improve the efficiency of light coupling in the waveguide, the solutions are still of limited use, as the crossed networks have to be laid out on both sides of a thin waveguide, and the solution may not be possible for a thick waveguide and certainly not for a window.
    [014] [014] Another method for efficiently coupling light to a waveguide is to arrange a Bragg grid arranged along a waveguide in order to improve the coupling efficiency in the waveguide. Such a method is described in the document in US 4737007. Although the proposed structure improves the efficiency of internal coupling in a waveguide, its application is limited to thin waveguides as they are based on the effects of interference and resonances guided mode . This approach may not be adequate to considerably improve the efficiency of internal coupling in a waveguide or optical window in which there is no distributed interaction between the network structure and the light diffracted by this type of network structure. Also, the improvement of the internal coupling efficiency in the structure proposed by the document in US 4737007 is limited to a narrow wavelength, that is, some angstroms. SUMMARY OF THE INVENTION
    [015] [015] The purpose of this invention is to overcome, at least partially, the limitations of the optical network couplers of the prior art. More specifically, the invention relates to a network coupler comprising: - an optical substrate arranged to transfer a beam of light, and - a diffraction network disposed or incorporated on the surface of said optical substrate, wherein said diffraction network comprises elements of diffraction grating substantially disposed in plane A of said diffraction grating, in which said diffraction grating elements define, for each cross-section thereof, a normal B for said plane A, in which said normal B separates said cross-section into two substantially symmetrical portions, and wherein said normal B further divides said elements of diffraction grating into a first side (FS) and a second side (SS), said first side (FS) it is located substantially in the direction from the propagation order of the diffracted light beam that has the highest intensity, transferred from the diffraction network, and the said second side (SS) is oriented opposite to the di the correct direction.
    [016] [016] The diffractive mesh elements comprise a coating that is arranged asymmetrically on said diffractive mesh elements. A main portion of said coating is arranged on both said first side (FS) and said second side (SS), and the network coupler is additionally arranged to satisfy the condition: (n1 x sen () + 2) / x P > 1, where - n1 is the refractive index of the optical medium in relation to the incident light side of the diffraction network elements, - n2 is the refractive index of the optical medium in relation to the diffracted light side of the network elements of diffraction, - ll is the absolute value of the incident angle of the light beam incident on the network coupler, - is the vacuum wavelength of the diffracted light, and - P is the period of the diffraction network elements.
    [017] [017] In a preferred embodiment, the asymmetric coating is a dielectric coating.
    [018] [018] The materials of the network coupler dielectric coating are chosen from materials that have a refractive index higher than 1.4 for wavelengths between 0.2 m and 2 m. Preferably, the dielectric coating materials are chosen from: ZnS, TiO2, HfO2, Ta2O5, ZrO2, AIN, AI2O3, ZnO, SiO2, Si3N4, MgF2, CaF2 or MgO. The dielectric coating can be a multilayer dielectric coating. An arrangement of a multilayer dielectric coating allows further enhancement of the design flexibility of the network coupler and then the light coupling efficiency of that network coupler.
    [019] [019] In a variant, a portion of the dielectric coating may comprise a portion in which a metallic coating or a semiconductor coating or a combination of these two coatings is arranged. The dielectric coating may also comprise a portion in which the dielectric material is replaced by a metallic coating or a semiconductor coating or a combination thereof. Materials for the dielectric coating are readily available and can be deposited at low cost on a high-throughput production line, such as roll-to-roll processing. In a variant, an asymmetric or semiconductor metallic coating can be arranged on the asymmetric dielectric coating.
    [020] [020] In a variant, the asymmetric coating can be a metallic coating or a semiconductor coating or it can be an asymmetric coating that comprises a metal and a semiconductor. In another variant, an asymmetric dielectric coating can be arranged on said asymmetric or semiconductor metallic coating. In yet another variant, a first asymmetric, metallic or semiconductor dielectric coating can be disposed on the first side (FS) of the diffraction mesh elements and a second asymmetric coating, which comprises a material different from said first asymmetric coating, can be disposed on the second side (SS) of the diffraction network elements.
    [021] [021] According to the invention, it was theoretically and experimentally identified and proven by the inventors of the current application that, when an asymmetric dielectric coating is available on symmetrical diffraction grating elements of a grating coupler, more efficient coupling as high as 50% can be obtained for the first or second order of diffraction of light coupled inside or outside a waveguide or window even in perpendicular incidence. In the past, it has been confirmed that a symmetrical diffraction network can couple a maximum of 50% of light in a first or second order of diffraction in perpendicular incidence and for light beams that have a symmetrical solid angle distribution around the normal of the network because there is always a first and a second diffraction order in which substantially the same light intensity is coupled to the first and second diffraction orders with opposite signals. Therefore, coupling efficiencies in a specific positive or negative diffraction order never sound higher than 50%.
    [022] [022] In one embodiment, the optical substrate on which the network coupler is arranged is a waveguide, arranged to guide a beam of light coupled internally, coupled by the network coupler to the waveguide.
    [023] [023] In another embodiment, the optical substrate on which the network coupler is arranged can also be an optical window, where "window" means any type of transparent optical material that has a thickness substantially greater than the wavelength of light coupled inside or outside said window. The network coupler arranged in a window is arranged to transfer, through the window, a beam of light coupled internally to that window, by the network coupler.
    [024] [024] The network coupler can be arranged on the surface of the optical substrate, but it can also be arranged inside the optical substrate. The network coupler can be arranged substantially close to the surface of the optical substrate, but it can also be incorporated within the optical substrate. The network coupler can be arranged on the side of the optical window opposite the side of incident light. The network coupler can be arranged as an input coupler or an output coupler. By definition, the term "output coupler" or, equivalently, "external coupler", is used when the light incident on said output coupler is transmitted from a dense optical medium to a less dense optical medium. The term "input coupler" or, equivalently, "internal coupler" is used in all other cases.
    [025] [025] Furthermore, the input coupler can be a reflection type network coupler in which a beam of light incident on said input coupler is reflected and diffracted substantially in one of the positive diffraction orders or one of the negative diffraction orders. .
    [026] [026] The optical substrate material of the optical waveguide or window substrate is a transparent material for wavelengths between 200 nm and 10 m, preferably between 350 nm and 3 m.
    [027] [027] In a preferred embodiment, the network coupler comprises network elements that are substantially elongated elements periodically distributed in the direction from a beam of light transferred from the diffraction network and in which the network elements are binary network elements . These binary network elements are easy to manufacture and replicate, allowing, through the provision of an asymmetric coating on the binary network elements, low cost network couplers that have efficiencies similar to shiny network couplers.
    [028] [028] According to different modalities, the mesh coupler may comprise elements of diffraction mesh that have a substantially rectangular, triangular, sinusoidal, cycloidal, trapezoidal, stair or semicircular cross section, the said cross section being defined in direction of the propagation light beam. The possibility of adapting different shaped cross sections allows greater flexibility in the design of the network coupler and, therefore,
    [029] [029] In one embodiment, the diffraction network elements of the network coupler are arranged as a two-dimensional array of diffraction network elements, arranged in the plane of said diffraction network.
    [030] [030] The network coupler can have both refraction and diffraction properties at the same time. The combination of refractive properties with the diffraction properties of the network coupler allows for more functionality in the design of optical devices using network couplers. For example, a network coupler can be arranged on a curved surface, allowing for the widest design flexibility of an optical system with the use of such a network coupler.
    [031] [031] The network coupler may comprise diffraction network elements in which the period of the diffraction network elements is in the order of the wavelength of the light wave incident on the network elements, the said diffraction network elements being they are arranged to allow substantially only a specific diffraction order in the interaction of light with said diffraction grating elements. The diffraction network elements of the network coupler can be wavelength substructures.
    [032] [032] In a preferred embodiment, the specific diffraction order for which the coupling efficiency of the network coupler is optimized, is the first negative diffraction order or the first positive diffraction order. This allows the network coupler to be arranged in a variety of optical devices that require a highly efficient dispersion effect from a reasonably high angle.
    [033] [033] In another embodiment, the specific diffraction order for which the coupling efficiency of the network coupler is optimized in the second negative diffraction order or the second positive diffraction order. This allows the use of the network coupler in typical arrangements necessary for most optical devices that require a good efficient dispersion effect at a higher angle than that which can be obtained by coupling in the first order of positive diffraction or the first negative diffraction order.
    [034] [034] The network coupler can be optimized for the first order of positive diffraction or the first order of negative diffraction or for the second order of positive diffraction or the second order of negative diffraction. The network coupler can also be designed for coupling higher-order diffraction orders, which can be useful in the case, for example, of optical devices that require specific optical configurations in which a high angle is required for internally coupled or coupled light externally.
    [035] [035] The invention also relates in addition to a light coupling system comprising: - an optical substrate for transferring a beam of light, - a network coupler, as described above, disposed on said optical substrate for internally coupling a beam of light incident on said network coupler to said optical substrate, - a network coupler, according to the invention, arranged on said optical substrate to externally couple a beam of light incident on said network coupler outside said optical substrate.
    [036] [036] The optical substrate of the light coupling system can be a window or it can be a waveguide.
    [037] [037] The invention also relates to a method for optimizing the coupling efficiency of the light coupled by the network coupler described above which comprises at least the steps of:
    [038] [038] The invention further relates to a method for diffracting a beam of light incident on a diffraction element with a diffraction efficiency higher than 50%, in the visible wavelength range, for any angle of incidence on the diffraction, in one of the positive or negative diffraction orders, said diffraction is carried out by the network coupler of the invention, as described above, the network coupler being disposed between a first and a second optical means. Said first and second optical means can be the same optical means.
    [039] [039] Said first optical medium may also have a lower refractive index than the refractive index of said second optical medium. In such a case, the method allows the propagation of a beam of light incident on said first optical medium before being diffracted by said network coupler on said second optical medium.
    [040] [040] In another embodiment, the method allows the propagation of a beam of light incident in said second optical medium before being diffracted by said network coupler in said first optical medium. This method modality allows the use of the network coupler as an external coupler, also called an output coupler.
    [041] [041] Said first optical medium and said second optical medium can have the same index of refraction or they can be the same material. In such a case, the method allows the propagation of a beam of light in said optical medium and the diffraction of the light beam incident on said network coupler in said optical means, passing through the network coupler. In this modality, the method allows the change in the direction of light that propagates within an optical medium or within an optical substrate that has at least one first and a second optical medium that have the same index of refraction. This method modality is useful for changing the direction of a propagation light within an optical medium.
    [042] [042] When the first optical medium and the second optical medium have the same refractive index or the same material, the method allows the change in the direction of a beam of propagation light in the optical media through reflection diffraction in the network coupler . This method modality is useful to change the direction of a beam of propagation light within an optical medium, so that the beam of propagation light is propagated, after diffraction by reflection by the network coupler, in the optical medium to the same side as the incident light side of the network coupler.
    [043] [043] Finally, the invention relates to the use of a network coupler, as described in the invention. BRIEF DESCRIPTION OF THE DRAWINGS
    [044] [044] The objectives and advantages described above of the present invention will become more readily apparent to those of ordinary skill in the art after analyzing the following detailed descriptions and accompanying drawings, in which: Figure 1a illustrates a cross section of a coupler of net comprising elements of diffraction net on which an asymmetric coating is arranged; Figure 1b illustrates a first side and a second side of a diffraction mesh element on which an asymmetric coating is arranged, as well as a reference plane A of the diffraction mesh element and a normal B for that reference plane A; Figure 1c illustrates the geometric parameters of the cross section of a diffraction mesh element of Figure 1a that comprises an asymmetric coating; Figure 1d illustrates a network coupler in which an asymmetric coating is arranged that comprises different coating portions; Figure 1e illustrates another network coupler in which an asymmetric coating is arranged that comprises different coating portions; Figure 1f illustrates another mesh coupler of which the first side and the second side of the diffraction mesh elements each comprise an asymmetric coating; Figure 2a illustrates a beam of light incident perpendicularly to a network coupler that comprises an asymmetric coating, and the internally coupled intensity of the zero and first transmitted orders obtained by that internal network coupler in a waveguide or a window;
    [045] [045] The following description illustrates the principles and examples of the modalities, according to the invention. Thus, it will be appreciated that those skilled in the art will be able to develop various provisions that, although not explicitly described or shown in this document, incorporate the outlined principles of the invention and are included in its scope as defined in the claims. In the description and in the Figures, similar numerical references refer to the same or similar components or structural elements. Also, the term "transparent", as used in this document, the description covers an average transparency of a beam of light of at least 70%, in the wavelength range of interest. The term "visible", as used in this document, means light between near and near infrared UV, that is, between 300 nm and 2 m, so the wavelength can be easily converted into light visible to the eye human. Also, the expression "waveguide" means an optical waveguide.
    [046] [046] According to the invention, it was theoretically and experimentally identified and demonstrated by the inventors of the current application that, by having a dielectric, metallic or asymmetric semiconductor coating on the symmetrical diffractive elements of a network coupler, higher than 50% coupling can be obtained for the first or second order of diffraction of the coupled light inside or outside a waveguide or window at any angle of incidence. The term waveguide means an optical substrate on which light is transmitted by multiple internal reflections from one portion of the waveguide to another portion. A waveguide according to the invention can be a multimode waveguide having a uniform diameter or it can be a tapered waveguide. The window means an optical substrate essentially used to transmit light from one side to the other side of the optical substrate, both without any internal reflection and, in some cases, by at least two internal reflections. A window can have waveguide properties. A window can comprise different transparent layers. In the past, it has been recognized that a symmetrical diffraction network can couple a maximum of 50% of light in a first or second order of positive or negative diffraction in perpendicular incidence, and for light beams that have a solid angle distribution that is symmetrical in relation to the normal diffraction network because there is always the same diffraction order of the opposite signal in which substantially the same light intensity is coupled.
    [047] [047] More specifically, the invention relates to high efficiency network couplers that comprise a diffraction network 3 comprising elements of diffraction network 4 in which an asymmetric coating is arranged, which allow to realize and replicate such optical couplers at cost very low. A main embodiment of the invention is to obtain coupling efficiencies higher than 50% for a specific positive or negative diffraction order, preferably the first or second diffraction order, with a mesh coupler 1 comprising symmetrically diffractive mesh elements conformed 4 which are easy and inexpensive to carry out and replicate. The network coupler 1 of the invention allows to obtain high coupling efficiency for a wide range of wavelengths. The network coupler of the invention can be used as dispersive optical elements very useful in optical systems and devices.
    [048] [048] According to a preferred embodiment of the invention, illustrated in Figure 1a and Figure 1b, a network coupler 1 comprises: - an optical substrate 2 arranged to transfer a beam of light 10 and, - a diffraction network 3, which comprises periodically arranged binary diffraction elements 4, arranged or incorporated on the surface of said optical substrate 2 - an asymmetric dielectric coating 5 disposed on the binary diffraction elements 4.
    [049] [049] The binary network elements 4 of said network coupler 1 are substantially arranged in plane A of the substantially flat diffraction network
    [050] [050] Each binary network element 4 defines, for each cross section of it, a normal B in relation to said plane A, this normal B separates said cross section into two substantially symmetrical portions, and said normal B further divides the elements diffraction network 4 on a first side (FS) and a second side (SS), the said first side (FS) being located substantially in the direction coming from the propagation order of the diffracted light beam that has the highest intensity , transferred from the diffraction grating, and said second side (SS) is oriented opposite to the said proceeding direction, as shown in Figure 1c.
    [051] [051] The network coupler 1, according to the preferred mode, can be used to couple light to a waveguide or a window with a substantially higher efficiency than 50% both in the first order of positive diffraction and in the order of negative diffraction even in the perpendicular view (a = 0 °), which is illustrated in Figure 2a, in which the beam with the highest intensity is shown as the thickest arrow. If the light is coupled by the network coupler 1 with high efficiency in the first positive diffraction order, the light coupled to the corresponding negative diffraction order will be low and vice versa. For example, if the light is coupled with an efficiency higher than 70% in the first order of positive diffraction, the light coupled in the order of negative diffraction will be substantially lower than 30%.
    [052] [052] In order to obtain coupling efficiencies higher than 50% in a specific positive or negative diffraction order, preferably the first diffraction order, the person skilled in the art will be able, using the coupling optimization method of light further explained, to identify the required geometric parameters and the necessary materials of the asymmetric dielectric coating 5 to be arranged on the network elements 4 of the network coupler 1 in order to achieve this objective. The cross-section and geometric parameters of a typical asymmetric dielectric coating 5, according to the preferred embodiment of the invention, are illustrated in Figure 1c. The main geometric and physical parameters of the diffraction grid elements 4 and the asymmetric dielectric coating 5 arranged in the diffraction grid elements 4 that need to be considered to realize a high efficiency optical coupling network comprising said diffraction grid elements 4 and said asymmetric dielectric coating 5 are: - the period P of the diffraction grid elements 4; - the crest width s; - the net depth t; - the thickness of side wall covering ds; - the thickness of the dielectric coating dt, the dielectric coating being disposed on the side of the incident light beam 10; - the db thickness of the dielectric coating of valley 5; the valley dielectric coating is defined as the portion of the asymmetric coating 5 arranged in a portion of the spacing 40 that separates the diffraction mesh elements 4; - the height of the side wall dielectric coating hs; - the width of the dielectric coating wt, of the portion of the asymmetric dielectric coating 5 arranged on the incident light side 10; - the difference in absolute permissiveness E1 = 1 (c- s) between the permittivity values of the dielectric coating 5 and the optical substrate 2; - the difference in absolute permissiveness E2 = I (t-c) between the permissiveness values of the adjacent material and on the incident light side of the network elements 4, and the dielectric coating 5; - the material chosen for the asymmetric dielectric coating 5.
    [053] [053] The diffraction network elements of the present invention are substantially binary network elements of which the resource size 40, which is defined as the spacing (ps) between the diffraction network elements 4, may have a different dimension than period P of the diffraction network elements 4.
    [055] [055] In order to obtain greater design flexibility and therefore also higher diffraction and coupling efficiency, a variant of the asymmetric dielectric coating 5 may comprise, as illustrated in Figures 1d and 1e, an arrangement of at least two asymmetric coating layers 51, 52, each designed and arranged according to the preceding definition of an asymmetric dielectric coating 5. Said at least two layers of asymmetric coating 51, 52 may comprise portions of a metal or a semiconductor or the combination of a metal and a semiconductor. The asymmetric dielectric coating 5 may comprise at least a portion in which the dielectric material is replaced by a metal, a semiconductor or a combination of a metal and a semiconductor, as shown in Figure 1e. At least a portion of the dielectric coating may also comprise a metallic and / or semiconductor layer disposed in the dielectric coating. In such a variant, where at least a portion having a material other than the asymmetric dielectric coating 5 is arranged on said asymmetric dielectric coating 5, the parameters of Table 1 are applicable for each of said portions.
    [056] [056] The asymmetric dielectric coating can be a multi-layer asymmetric dielectric coating.
    [057] [057] In a variant, illustrated in Figure 3a, the main difference is that no dielectric layer 5 is disposed between two successive diffraction grid elements 4, and only a portion of the surface of the side walls 41 of the binary grid elements 4 can comprise a dielectric layer 5.
    [058] [058] Figure 3b shows the theoretical first order diffraction efficiency obtained from a mesh coupler 1 arranged on a glass substrate 2 and comprising diffraction mesh elements 4 that have a structure, according to Figure 3a, which comprises an asymmetric ZnS dielectric coating, and which has the following set of parameters of the grid diffraction elements 4 of the network coupler 1:
    [059] [059] In another variant, the asymmetric dielectric coating 5 disposed on the binary network elements 4 has a similar layout to the step, whose geometry and parameters are illustrated in Figure 3c. Figure 3d shows the first order diffraction efficiency obtained from a network coupler 1 comprising network element structures, according to Figure 3c, which has an asymmetric ZnS 5 dielectric coating, and arranged on a glass substrate. 2, and which has the following set of parameters of the grid diffraction elements 4 of the network coupler 1: p = 440 nm; s = 220 nm; t = 320 nm; ds = 140 nm; dt = 140 nm; db = 0 nm; hs = 460 nm; wt = 360 nm; c = 6.7; s = 2.25; t = 1 (ar); refractive index (n) of ZnS = 2.6; n (glass) = 1.5
    [060] [060] In another variant, the asymmetric dielectric coating 5 disposed on the binary network elements 4 has an arrangement similar to the multiple stages, whose geometry and parameters are illustrated in Figure 3e. Figure 3f shows the first order diffraction efficiencies (theoretically and experimentally) obtained from a network coupler 1 comprising network element structures 4, according to Figure 3e which has an asymmetric ZnS 5 dielectric coating, and disposed on a glass substrate 2, and which has the following set of parameters of the grid diffraction elements 4 of the network coupler 1: p = 440 nm; h1 = 280 nm; h2 = 100 nm; t = 285 nm; w = 145 nm d1 = 100 nm; d2 = 172 nm; d3 = 23 nm; hb = 55 nm; ht = 150 nm;
    [061] [061] In another variant, shown in Figure 3g, the network coupler 1, which comprises binary network elements 4 and the asymmetric dielectric coating 5 disposed on the binary network elements 4, is incorporated in the optical substrate 2. Alternatively, the network coupler 1 can be arranged at the interface of a first optical medium and a second optical medium, in which both optical means have the same index of refraction. Said first and said second optical means can be separated by a refractive index matching material, preferably a thin layer of an index adapting liquid, the thin layer having a typical thickness of less than 1 micron. Said index adaptation material can be a layer of glue. More precisely, the network coupler can be arranged at a distance from the surface of the optical substrate 2 substantially equal to the height hs of the binary diffraction network elements 4 of the network coupler 1. There is no limitation on the distance of the built-in network coupler 1 to the surface of the optical surface, although, in practical systems, this distance may be typical in the range of one mm or one cm. The network coupler 1 can be parallel to the surface of the optical substrate 2 or it can have any angle of inclination in relation to the surface of the optical substrate 2. The geometry and parameters of an example built-in network coupler 1 are shown in Figure 3g. Figure 3h shows the diffraction efficiency obtained from an embedded mesh coupler 1 comprising diffractive mesh element structures 4, according to Figure 3g, comprising an asymmetric ZnS 5 dielectric coating, and disposed within a substrate of glass 2, and which has the following set of parameters of the diffraction elements 4 of the embedded coupler 1: p = 440 nm; hs = 470 nm; w = 145 nm;
    [062] [062] In one embodiment, the asymmetric coating 5 is a metallic coating. Figure 7a shows the cross-section of the binary network elements 4 in which an asymmetric metallic coating is arranged, which have an arrangement similar to the step. Figure 7b shows the first-order reflection diffraction efficiency of an optical coupler comprising network element structures, according to Figure 7a, and arranged on a glass substrate 2, and which has the following set of element parameters grid diffraction 4 of network coupler 1: p = 440 nm; s = 176 nm; t = 300 nm; ds = 90 nm; dt = 90 nm; hs = 340 nm; w = 266 nm; Metal: Al; n (glass) = 1.5.
    [063] [063] A variant of the binary network elements 4 in which an asymmetrical metallic coating 5 is arranged, which have a similar layout to the step, is illustrated in Figure 7c. Figure 7d shows the first-order diffraction efficiency obtained from an optical coupler 1 comprising network element structures 4, according to Figure 7c, and arranged on a glass substrate 2 and which has the following set of element parameters grid diffraction 4 of network coupler 1: p = 440 nm; s = 220 nm; t = 250 nm; ds = 13 nm; dt = 4 nm; hs = 104 nm; w = 224 nm; Metal: Al; n (glass) = 1.5.
    [064] [064] In one embodiment, the asymmetric coating 5 can be a semiconductor coating. In a variant, the asymmetric coating 5 can comprise at least two portions, each portion being a metal or a semiconductor. In a variant, the asymmetric coating 5 may comprise an asymmetric dielectric coating arranged in an asymmetric metallic coating or an asymmetric semiconductor coating.
    [065] [065] Figures 4a, 4b, 4c show SEM images of exemplary network couplers 1 comprising binary network elements 4 on which an asymmetric coating 5 is deposited. The asymmetric dielectric coating structure 5 shown in Figure 4b corresponds to an embodiment of the network coupler of Figure 1a and Figure 1b. Figure 4d shows the corresponding measured coupling efficiency obtained for this structure. Figure 4e shows a typical test setup, well known to a person skilled in the art of optical test systems. In order to test the diffraction efficiency of the network coupler 1, the network coupler 1 is arranged on a transparent support. The sample comprising the network coupler 1 is illuminated by a light source L whose wavelength can be changed. The light diffracted by the network coupler l is detected by a rotating detector, as shown in Figure 4e.
    [066] [066] It is important to note that the range of parameters (in addition to the network period) summarized in table 1, to make an efficient coupler, according to said exemplary network coupler, which can be an internal coupler or an external coupler, it is independent of the type of optical substrate to which the light is attached. More precisely, the optical substrate 1 is preferably a waveguide, but it can also be a window or any transparent support on which the network coupler is arranged. Said optical substrate 2 can comprise a plurality of optical substrates and at least one of said optical substrates can be a liquid substrate or a substrate that comprises at least a portion of liquid. The internal coupling efficiency of the network coupler 1 is merely determined by the geometric parameters described above summarized in Table 1 and the physical characteristics of the materials of the optical substrate 2 and the asymmetric dielectric coating 5. It should be noted that said coupling efficiency is not influenced by no interaction or interference from partially reflected light from at least a portion of the coupled light beam from any surface that can be arranged on the side of the network coupler opposite the side of incident light, such as in the case of waveguides resonants or zero-order filters or in the case of waveguides in which the coupling efficiencies can be intensified by escape waves that interact or interfere with the coupled light through a network arranged in such waveguides.
    [067] [067] The network coupler 1, according to the preferred mode, can be arranged and optimized as an input coupler (also called "internal coupler") to efficiently coupling light from a first optical medium to a second optical medium which has a higher optical density than the first optical medium, for example, for coupling a beam of incident light 10 transmitted in the air to a substrate produced from glass or plastic. The network coupler 1 can also be designed and optimized as an output coupler (also called an "external coupler"), to efficiently externally couple the light from a first dense optical medium to a second optical medium that is optically less dense than the first optical medium, for example, in the case of a beam of light 30 leaving a glass substrate for an external optical medium that has a lower refractive index, preferably air.
    [068] [068] Figure 5 illustrates several non-limiting types of network couplers, arranged as input couplers or output couplers.
    [069] [069] Figure 5a shows a network coupler 1 arranged as an input coupler, arranged on the incident light side of an optical substrate 2. Such an arrangement can be used to couple light within a window or a waveguide.
    [070] [070] Figure 5b shows another network coupler 1 arranged as an internal coupler. Such an arrangement can be used to attach light inside a window or a waveguide. The light incident on the network coupler 1 can be a propagation beam within a window or waveguide incident on the network coupler after at least one internal reflection in said window or waveguide, but it can also be a direct incident beam transmitted by the optical substrate without any internal reflection within said optical substrate. An exemplary application is when it is desired that the network coupler 1 is arranged on the side of a window or waveguide opposite the beam of light incident on that window or waveguide. A possible application is in optical systems that require the coupling of light on the side of a light source and in which the said light source is arranged directly on the optical substrate 2.
    [071] [071] Figure 5c shows a network coupler 1 arranged as an external coupler. Such an arrangement can be used to couple light, which spreads inside a window or waveguide, outside that window or waveguide.
    [072] [072] Figure 5d shows a network coupler 1 arranged to change the direction of a beam of light that propagates inside a window or a waveguide. The beam of light redirected by the network coupler can further propagate within a window or waveguide or it can also be transmitted outside the optical substrate without any internal reflection within said optical substrate. An exemplary application is when you want the network coupler to be arranged on the side of a window or waveguide opposite the beam of light coupled externally to that window or waveguide. A possible application is in systems that require the coupling of light that spreads inside a window or waveguide, on a photodetector disposed opposite to said photodetector.
    [073] [073] Figure 5e and Figure 5f illustrate built-in network couplers.
    [074] [074] Figure 5f shows a network coupler 1, arranged as a reflection network coupler, incorporated in an optical substrate 2 and arranged to change the direction of the light beam that propagates within the optical substrate 2.
    [075] [075] The network couplers 1 described can be arranged in different combinations, as shown in Figures 5g to 5j. For example, two different types of network couplers can be arranged respectively as an internal coupler and an external coupler in a waveguide or an optical window, each on the same side or each on the other side of the guide. waves or the optical window.
    [076] [076] In one embodiment, the network coupler 1 can comprise at least two equal or different network couplers 100, 101, arranged parallel to each other or arranged at a relative angle, as shown in Figure 5k and Figure 5I. It will be obvious to the person skilled in the art to have network couplers in close proximity, preferably separated substantially by the height hs of the network couplers. A network coupler comprising at least two equal or different network couplers, in close proximity, allows the realization of network couplers with greater design flexibility, such as optimization depending on the wavelength, diffracted angles and coupling efficiencies higher.
    [077] [077] Network couplers 1, as shown in Figure 5, can be applied in a wide range of applications, such as, without limitation, wearable screens, for example, google glasses, transparent screens, applications optical signaling, for example, in car panels, lightning applications, sunlight concentrators, optical systems for redirecting light, optical detection platforms, security elements that include waveguides, applications for documents integrated into security devices and also security seals.
    [078] [078] In several different embodiments, the network coupler 1 may comprise elements of diffraction network 4 that have substantially rectangular, triangular, sinusoidal, cycloidal, trapezoidal, stair or semicircular cross sections, said cross sections being defined in direction of the propagation light beam. Figures 6a, 6b and 6c show examples of a mesh coupler 1 comprising diffractive mesh elements 4 having a substantially semicircular cross-section, a substantially triangular cross-section and a substantially sinusoidal cross-section respectively. Figure 3i shows a diffraction mesh coupler that has a sinusoidal cross-section and the transmission coupling efficiency of the diffraction mesh coupler of Figure 3i.
    [079] [079] The network coupler, according to the invention, can be arranged and optimized to couple, by diffraction, a beam of light with an efficiency higher than 50% to any of the positive or negative diffraction orders. An exemplary result of such an efficient light coupling in perpendicular incidence in the second positive order is shown in Figure 8.
    [080] [080] The network couplers 1, according to the previous modalities, can be applied in a wide range of optical devices. The network couplers can be designed as input couplers or as output couplers of a beam of light. The combination of input couplers 1 and / or output couplers 1 allows for a wide range of arrangements for managing light in a wide variety of optical systems, comprising a wide range of possible optical substrates 1.
    [081] [081] The diffraction network elements 4 of the network coupler 1 are substantially elongated elements periodically distributed in the direction from a beam of light transferred from the diffraction, but, in one embodiment, the network coupler may comprise network elements 4 which are distributed in a two-dimensional arrangement of said network elements, arranged on the plane of said diffraction network and these network elements can have refraction and diffraction properties, for example, obtained by a two-dimensional distribution of network elements in substantially format Circular.
    [082] [082] Network couplers 1, according to the different modalities of the invention, are realized by a new approach to manufacture asymmetric diffraction networks, which does not depend on sophisticated network masters. The binary diffraction grids readily available are replicated in a standard UV casting process and subsequently the angle evaporated with both dielectrics and metals to perform the asymmetric coating and, thus, the network elements shine after the replica of the network elements. This manufacturing method is illustrated in Figure 9, in which the deposition D of an asymmetric coating on the elements of the diffraction grating is carried out at a predetermined angle. The process of depositing a coating at a certain angle on a substrate is well known to the person skilled in the D technique.
    [083] [083] The entire manufacturing process of the diffraction mesh elements 4 comprising an asymmetric coating 5 on each of the said diffraction mesh elements 4 is suitable for mass production and, therefore, the present approach is an inexpensive alternative existing industrial manufacturing methods of shiny networks. Since the network coupler to be replicated is a very simple structure, it can be replicated by any of the common mass production methods, such as hot embossing or injection molding and the replication process is not limited to UV casting.
    [084] [084] The invention also relates to a light coupling system 200, comprising: - an optical substrate 2 for transferring a beam of light, - an input network coupler 100 disposed on said optical substrate 2 for internally coupling a light incident on said optical substrate 2, - an output network coupler 102 disposed on said optical substrate 2 to externally couple the light of said optical substrate 2.
    [085] [085] The optical substrate 2 of the light coupling system 200 can be a waveguide or the window.
    [086] [086] The light coupling system 200 can be realized by arranging on the optical substrate 2 different modalities of the network couplers 1, as described above. The light coupling system 200 can comprise at least two network couplers 1 arranged as input couplers, and can comprise at least two network couplers arranged as output couplers. The light coupling system 200 can comprise several light coupling portions, and each portion can be arranged in a different plane.
    [087] [087] Figures 10a and 10b show two exemplary embodiments of a light coupling system 200, in which an internal coupler 100 and an external coupler 102 comprise binary network elements 4 in which an asymmetric coating 5 is arranged and which are adapted to the light coupling system 200 for coupling the light respectively inside and outside an optical substrate 2, which can be a window or a waveguide, preferably a multimode waveguide.
    [088] [088] Figures 10c and 10d show two other exemplary embodiments of a light coupling system 200, in which the inner coupler 100 and / or the outer coupler 102 are incorporated into the optical substrate 2 of the light coupling system 200 and that they are respectively arranged to couple the light inside and outside of the optical substrate 2, said optical substrate 2 being a window or a waveguide, preferably a multimode waveguide.
    [089] [089] Figure 11 shows an exemplary light coupling system 200 comprising two portions 202, 204, each portion being a light coupling system 200, and in which a network coupler 145 is arranged to deflect the beam incident light 11 on that network coupler 145. An exemplary application of a network coupler 145 on a light coupling system 200 is its use as a replacement for a reflective mirror, with the advantage that no mirror has to be adapted to the light coupling system 200, thereby improving the mechanical stability of the optical system in which the light coupling system 200 is used, but also reducing its cost.
    [090] [090] The invention also relates in addition to a method to optimize the coupling efficiency of the light coupled by the network coupler 1 described, which comprises at least the steps of: - choosing the geometry, dimension and materials of the optical substrate 2, from Diffraction Grid 3 and Diffraction Grid Elements 4; - determine the angle of the light incident on the diffraction grid 3; - determine the wavelength range of the light beam incident on the network coupler 1; - determine the desired diffraction order and the angle of the diffracted light incident on the network coupler 1; - determine the materials of the asymmetric coating 5; - choose gross values for a set of parameters for the dielectric coating, in which said parameters comprise the coverage distribution, deduced by the angle of the main evaporation of the material to be deposited on the diffraction mesh elements, and the thickness of the dielectric coating arranged diffraction network elements; - proceed to an optical coupling simulation step, using an iteration algorithm, to determine the set of optimized parameters, and the simulation step is performed to maximize the coupling efficiency of the incident light beam 10 in said network diffraction 1, which passes through said diffraction network 3 or reflected outside said diffraction network 3, said step being carried out for the first or second diffraction order of the light beam diffracted by said diffraction network.
    [091] [091] The invention also relates in addition to a method for diffracting a beam of light 10 incident on a diffraction element with a diffraction efficiency higher than 50%, in the visible wavelength range, in one of the diffraction orders. positive or negative, and at any angle of incidence of said beam of light, said diffraction being carried out by the network coupler 1 of the invention, as previously described.
    [092] [092] Finally, the invention relates to the use of a network coupler 1, as described in the invention.
    权利要求:
    Claims (24)
    [1]
    1. Network coupler (1) CHARACTERIZED by the fact that it comprises: - an optical substrate (2) arranged to transfer a beam of light, and - a diffraction network (3) arranged or incorporated in the surface of said optical substrate (2 ), wherein said diffraction grating (3) comprises diffraction grating elements (4) substantially arranged on the plane (A) of said diffraction grating (3), wherein said diffraction grating elements (4 ) define for each cross-section of them, a normal (B) for said plane (A), in which said normal (B) separates said cross-section into two substantially symmetrical portions, and said normal (B) further divides said diffraction network elements (4) on a first side (FS) and a second side (SS), said first side (FS) being substantially in the direction coming from the propagated order of the diffracted light beam that has the highest intensity, transferred from the diffraction net (3), with the said second side (SS) is oriented opposite to said proceeding direction, in which each of the said elements of diffraction grating (4) comprises at least one coating (5), said coating (5) being arranged asymmetrically in the said diffraction mesh elements (4), and wherein a main portion of said coating (5) is arranged on both said first side (FS) and said second side (SS), and wherein the mesh coupler (1 ) is additionally arranged to satisfy the condition: (n1 x sen (ΙαΙ) + η2) / λ x P> 1, where n1 is the index of refraction of the optical medium in relation to the incident light side of the diffraction network elements (4), n2 is the index of refraction of the optical medium in relation to the diffracted light side of the diffraction network elements (4), lαl is the absolute value of the incident angle of the light beam incident on the network coupler ( 1) λ is the wavelength of the diffracted light, and P is the period of the diffraction network elements (4), and in which said network coupler has an efficiency it was substantially higher than 50% in both the first positive diffraction order and the first negative diffraction order.
    [2]
    2. Network coupler (1), according to claim 1, CHARACTERIZED by the fact that said coating (5) is a dielectric coating.
    [3]
    3. Network coupler (1), according to claim 2, CHARACTERIZED by the fact that the dielectric coating (5) is a multilayer dielectric coating.
    [4]
    4. Mesh coupler (1) according to any one of claims 1 to 3, CHARACTERIZED by the fact that the materials of the dielectric coating (5) are chosen from materials that have a refractive index higher than 1.4 for wavelengths between 0.2 and 2 μm.
    [5]
    5. Network coupler (1), according to claim 4, CHARACTERIZED by the fact that the material of the dielectric coating (5) is chosen from the group ZnS, TiO2, HfO2, Ta2O5, ZrO2, AIN, AI2O3, ZnO, SiO2, Si3N4, MgF2, CaF2 or MgO, or any combination thereof.
    [6]
    6. Network coupler (1), according to claim 1, CHARACTERIZED by the fact that said coating (5) is a metallic coating.
    [7]
    7. Network coupler (1), according to claim 1, CHARACTERIZED by the fact that said coating (5) is a semi-coating
    conductor.
    [8]
    Grid coupler (1) according to any one of claims 1 to 7, CHARACTERIZED by the fact that said coating (5) comprises at least two materials chosen from dielectrics, metals or semiconductors.
    [9]
    Mesh coupler (1) according to any one of claims 1 to 8, CHARACTERIZED by the fact that said coating (5) comprises a first coating (51) and a second coating (52), each arranged asymmetrically.
    [10]
    10. Network coupler (1) according to claim 9, CHARACTERIZED by the fact that a main portion of said first coating (51) and said second coating (52) is respectively arranged on said first side (FS ) and on said second side (SS).
    [11]
    11. Network coupler (1) according to any one of claims 1 to 10, CHARACTERIZED by the fact that the optical substrate (2) is a waveguide, arranged to guide an internally coupled beam of light (11), coupled by said network coupler (1), in said waveguide.
    [12]
    Network coupler (1) according to any one of claims 1 to 10, CHARACTERIZED by the fact that the optical substrate material (2) is an optical window, arranged to transfer, through said optical window, a beam light coupled internally (11) in said optical window, through said diffraction grating (3).
    [13]
    13. Network coupler (1) according to any one of claims 1 to 12, CHARACTERIZED by the fact that the optical substrate material (2) is transparent to wavelengths between 200 nm and 10 μm, preferably between 350 nm and 3 μm.
    [14]
    14. Mesh coupler (1) according to any one of claims 1 to 13, CHARACTERIZED by the fact that the diffraction mesh elements (4) have a substantially rectangular, triangular, cycloidal, trapezoidal, stair or cross section semicircular, and said cross-section is defined in the direction of the beam of propagation light.
    [15]
    15. Mesh coupler (1) according to any one of claims 1 to 13, CHARACTERIZED by the fact that the diffraction mesh elements (4) have a substantially sinusoidal cross section, the said cross section being defined in direction of the propagation light beam.
    [16]
    16. Mesh coupler (1) according to any one of claims 1 to 15, CHARACTERIZED by the fact that the diffraction mesh elements (4) are substantially elongated elements periodically distributed in the direction preceding a beam of light transferred from the diffraction grating (3).
    [17]
    17. Network coupler (1), according to claim 16, CHARACTERIZED by the fact that the diffraction network elements (4) are binary network elements.
    [18]
    18. Mesh coupler (1) according to any one of claims 1 to 17, CHARACTERIZED by the fact that the diffraction mesh elements (4) are distributed in a two-dimensional arrangement of said diffraction mesh elements (4) , arranged on the plane of said diffraction grating (3).
    [19]
    19. Mesh coupler (1) according to any one of claims 1 to 18, CHARACTERIZED by the fact that the diffraction mesh elements (4) have refractive and diffractive properties.
    [20]
    20. Network coupler (1) according to any one of claims 1 to 19, CHARACTERIZED by the fact that the period of the diffraction network elements (4) is in the order of the wavelength of the incident light beam (10) in said diffraction network elements (4), and in which said diffraction network elements (4) are arranged to allow substantially only a specific diffraction order in the interaction of light with said network elements diffraction (4).
    [21]
    21. Network coupler (1) according to claim 20,
    CHARACTERIZED by the fact that said specific diffraction order is the first negative diffraction order or the first positive diffraction order.
    [22]
    22. Network coupler (1), according to claim 20, CHARACTERIZED by the fact that said specific diffraction order is the second negative diffraction order or the second positive diffraction order.
    [23]
    23. Light coupling system (200) CHARACTERIZED by the fact that it comprises: - an optical substrate (2) for transferring a beam of light, - a network coupler (1), as defined in any of the claims 1 to 19, arranged on said optical substrate (2) to internally couple a beam of incident light (10) on said network coupler (1) to said optical substrate (2), - a network coupler (1), as defined in any one of claims 1 to 22, arranged on said optical substrate (2) to externally couple a beam of incident light (10) to said network coupler (1) outside said optical substrate (2).
    [24]
    24. Light coupling system (200), according to claim 23, CHARACTERIZED by the fact that the optical substrate (2) is a waveguide or a window.
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    同族专利:
    公开号 | 公开日
    EP3063570B1|2021-03-17|
    US9557458B2|2017-01-31|
    US20160274281A1|2016-09-22|
    CN105765421B|2019-07-09|
    EP3063570A1|2016-09-07|
    WO2015062641A1|2015-05-07|
    CN105765421A|2016-07-13|
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    2021-03-30| B06U| Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]|
    2021-07-13| B11B| Dismissal acc. art. 36, par 1 of ipl - no reply within 90 days to fullfil the necessary requirements|
    2021-12-07| B350| Update of information on the portal [chapter 15.35 patent gazette]|
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    PCT/EP2013/072659|WO2015062641A1|2013-10-29|2013-10-29|Optical grating coupling structure|
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